During the manufacturing of semiconductors, FPD (Flat Panel Display) and solar cells, the processes of Cleaning, Etching, Stripping and Photo-Lithography etc. often require the use of high-purity chemicals. This equipment is a device capable of maintaining the high purity of chemicals while dispensing chemicals for manufacturing processes safely. Chemicals are often transported by chemical manufacturers to manufacturing factories with the use of chemical containers (200L～20m3).Through pump delivery or nitrogen-driven method, chemicals are supplied from containers directly or via storage tanks. In addition, after removal of particles and impurities through filtering, chemicals are dispensed to manufacturing devices via conveying pipes.
This equipment is formed by CCB (Clean Coupling Booth), CDB (Clean Drum Booth), Transfer Unit, CDM (Chemical Dispense Module), Storage Tank, Supply Tank, Chemical Dispense Pipeline, VMB (Valve Manifold Box) etc.
According to the usage amount of chemicals, the system is divided into three types of Lorry System Drum System with Tank), LS-200 (Drum System without Tank).
In addition, according to the types of chemicals, the systems are classified into three types of Model-1 for solvents, Model-2 for acids and bases and Model-3 for corrosive solvents.
Description of Materials
Fluid receiving parts for solvent chemicals use the material of stainless steel (SS316LEP, SS316LBA), and the equipment external structure uses the material of stainless steel (SS304) ((Model-1)). Fluid receiving parts for acid and base chemicals use the material of fluorine resin (PFA, PTFE), and the equipment external structure uses the material of PP or PVC (Model-2). Fluid receiving parts for corrosive solvent chemicals use the material of fluorine resin (PFA, PTFE) and the equipment external structure uses the material of stainless steel (SS304) (Model-3).
